Mutumi Tuda

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus capable of evaluating process performance
- Patent number 6,929,712
- Issue date Aug 16, 2005
- Renesas Technology Corp.
- Minoru Hanazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 6,651,678
- Issue date Nov 25, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Kenji Shintani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generating apparatus
- Patent number 6,335,595
- Issue date Jan 1, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Kazuyasu Nishikawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma generating apparatus with multiple microwave introducing means
- Patent number 6,109,208
- Issue date Aug 29, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Masaaki Tsuchihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetically enhanced microwave plasma generating apparatus
- Patent number 6,054,016
- Issue date Apr 25, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Mutumi Tuda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Plasma processing apparatus capable of evaluating process performance
- Publication number 20030178140
- Publication date Sep 25, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Minoru Hanazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing method of semiconductor device
- Publication number 20030096505
- Publication date May 22, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Kenji Shintani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma generating apparatus
- Publication number 20020047544
- Publication date Apr 25, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Kazuyasu Nishikawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR