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Seoul, KR
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last 30 patents
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Patent Grant
Extreme ultraviolet light source system
Patent number
11,415,891
Issue date
Aug 16, 2022
Samsung Electronics Co., Ltd.
Sunghyup Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light source systems
Patent number
11,304,287
Issue date
Apr 12, 2022
Samsung Electronics Co., Ltd.
Sunghyup Kim
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEMS
Publication number
20220104336
Publication date
Mar 31, 2022
Samsung Electronics Co., Ltd.
SUNGHYUP KIM
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM
Publication number
20220075271
Publication date
Mar 10, 2022
Samsung Electronics Co., Ltd.
Sunghyup Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY