Myungsun Choi

Person

Hwaseong-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma etching method and semiconductor device fabrication method i...
- Patent number 12,020,903
- Issue date Jun 25, 2024
- Samsung Electronics Co., Ltd.
- Yonghee Kim
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Plasma etching apparatus, plasma etching method, and semiconductor...
- Patent number 11,658,039
- Issue date May 23, 2023
- Samsung Electronics Co., Ltd.
- Kyuho Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method and semiconductor device fabrication method i...
- Patent number 11,545,341
- Issue date Jan 3, 2023
- Samsung Electronics Co., Ltd.
- Yonghee Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and plasma processing apparatus including the same
- Patent number 11,398,397
- Issue date Jul 26, 2022
- Samsung Electronics Co., Ltd.
- Yongwoo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of plasma etching and method of fabricating semiconductor de...
- Patent number 11,075,089
- Issue date Jul 27, 2021
- Samsung Electronics Co., Ltd.
- Hoyong Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of plasma etching and method of fabricating semiconductor de...
- Patent number 11,075,088
- Issue date Jul 27, 2021
- Samsung Electronics Co., Ltd.
- Hoyong Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of plasma etching and method of fabricating semiconductor de...
- Patent number 10,622,217
- Issue date Apr 14, 2020
- Samsung Electronics Co., Ltd.
- Hoyong Park
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING METHOD AND SEMICONDUCTOR DEVICE FABRICATION METHOD I...
- Publication number 20230084124
- Publication date Mar 16, 2023
- Samsung Electronics Co., Ltd.
- Yonghee KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING APPARATUS, PLASMA ETCHING METHOD, AND SEMICONDUCTOR...
- Publication number 20220020597
- Publication date Jan 20, 2022
- Samsung Electronics Co., Ltd.
- KYUHO KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND SEMICONDUCTOR DEVICE FABRICATION METHOD I...
- Publication number 20210104382
- Publication date Apr 8, 2021
- Samsung Electronics Co., Ltd.
- Yonghee KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PLASMA ETCHING AND METHOD OF FABRICATING SEMICONDUCTOR DE...
- Publication number 20200234964
- Publication date Jul 23, 2020
- Samsung Electronics Co., Ltd.
- Hoyong PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PLASMA ETCHING AND METHOD OF FABRICATING SEMICONDUCTOR DE...
- Publication number 20200234965
- Publication date Jul 23, 2020
- Samsung Electronics Co., Ltd.
- Hoyong PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20200161157
- Publication date May 21, 2020
- Samsung Electronics Co., Ltd.
- Yongwoo LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PLASMA ETCHING AND METHOD OF FABRICATING SEMICONDUCTOR DE...
- Publication number 20170229312
- Publication date Aug 10, 2017
- Samsung Electronics Co., Ltd.
- Hoyong PARK
- H01 - BASIC ELECTRIC ELEMENTS

Myungsun Choi

Person

Patents Grantslast 30 patents

Plasma etching method and semiconductor device fabrication method i...

Plasma etching apparatus, plasma etching method, and semiconductor...

Plasma etching method and semiconductor device fabrication method i...

Electrostatic chuck and plasma processing apparatus including the same

Method of plasma etching and method of fabricating semiconductor de...

Method of plasma etching and method of fabricating semiconductor de...

Method of plasma etching and method of fabricating semiconductor de...

Patents Applicationslast 30 patents

PLASMA ETCHING METHOD AND SEMICONDUCTOR DEVICE FABRICATION METHOD I...

PLASMA ETCHING APPARATUS, PLASMA ETCHING METHOD, AND SEMICONDUCTOR...

PLASMA ETCHING METHOD AND SEMICONDUCTOR DEVICE FABRICATION METHOD I...

METHOD OF PLASMA ETCHING AND METHOD OF FABRICATING SEMICONDUCTOR DE...

METHOD OF PLASMA ETCHING AND METHOD OF FABRICATING SEMICONDUCTOR DE...

ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPARATUS INCLUDING THE SAME

METHOD OF PLASMA ETCHING AND METHOD OF FABRICATING SEMICONDUCTOR DE...