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Nadya Belova
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Portland, OR, US
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last 30 patents
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Patent Grant
Method for post-OPC multi layer overlay quality inspection
Patent number
7,376,260
Issue date
May 20, 2008
LSI Logic Corporation
Neal Callan
G06 - COMPUTING CALCULATING COUNTING
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last 30 patents
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Patent Application
Method for post-OPC multi layer overlay quality inspection
Publication number
20050100802
Publication date
May 12, 2005
Neal Callan
G06 - COMPUTING CALCULATING COUNTING