Nagano Hidekazu

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and apparatus
- Patent number 7,202,161
- Issue date Apr 10, 2007
- Ebara Corporation
- Koji Mishima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing method and apparatus
- Publication number 20040241985
- Publication date Dec 2, 2004
- Koji Mishima
- H01 - BASIC ELECTRIC ELEMENTS