Nagayasu HIRAMATSU

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film forming apparatus and gas injection member used therefor
- Patent number 11,069,512
- Issue date Jul 20, 2021
- Tokyo Electron Limited
- Shinya Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method
- Patent number 10,319,585
- Issue date Jun 11, 2019
- Tokyo Electron Limited
- Kohichi Satoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD
- Publication number 20180102244
- Publication date Apr 12, 2018
- TOKYO ELECTRON LIMITED
- Kohichi SATOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS AND GAS INJECTION MEMBER USED THEREFOR
- Publication number 20180047541
- Publication date Feb 15, 2018
- Shinya OKABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...