Nagayasu HIRAMATSU

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Hillsboro, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and film forming system
- Patent number 11,984,319
- Issue date May 14, 2024
- Tokyo Electron Limited
- Kensaku Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flow rate control method, flow rate control device, and film formin...
- Patent number 11,753,719
- Issue date Sep 12, 2023
- Tokyo Electron Limited
- Kennan Mo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming tungsten film and controller
- Patent number 11,629,404
- Issue date Apr 18, 2023
- Tokyo Electron Limited
- Kensaku Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method
- Patent number 10,910,225
- Issue date Feb 2, 2021
- Tokyo Electron Limited
- Kensaku Narushima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate Processing Method and Film Forming System
- Publication number 20200258747
- Publication date Aug 13, 2020
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming Tungsten Film and Controller
- Publication number 20190292656
- Publication date Sep 26, 2019
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOW RATE CONTROL METHOD, FLOW RATE CONTROL DEVICE, AND FILM FORMIN...
- Publication number 20190284698
- Publication date Sep 19, 2019
- TOKYO ELECTRON LIMITED
- Kennan MO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Method
- Publication number 20190164768
- Publication date May 30, 2019
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...