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Nagisa Takami
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Yokkaichi-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Etching method using hydrogen peroxide solution containing tungsten
Patent number
9,929,017
Issue date
Mar 27, 2018
TOSHIBA MEMORY CORPORATION
Nagisa Takami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of semiconductor storage device
Patent number
8,728,888
Issue date
May 20, 2014
Kabushiki Kaisha Toshiba
Naoyuki Iida
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF CLEANING SEMICONDUCTOR SUBSTRATE AND APPARATUS FOR CLEANI...
Publication number
20150034130
Publication date
Feb 5, 2015
KABUSHIKI KAISHA TOSHIBA
Tatsuhiko KOIDE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD, ETCHING APPARATUS AND CHEMICAL SOLUTION
Publication number
20140073069
Publication date
Mar 13, 2014
Kabushiki Kaisha Toshiba
Nagisa TAKAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STORAGE DEVICE
Publication number
20140065812
Publication date
Mar 6, 2014
Kabushiki Kaisha Toshiba
Naoyuki IIDA
H01 - BASIC ELECTRIC ELEMENTS