Nahomi Ohta

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning/drying station and production line for semiconductor devices
- Patent number 6,336,463
- Issue date Jan 8, 2002
- NEC Corporation
- Nahomi Ohta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing line
- Patent number 6,328,768
- Issue date Dec 11, 2001
- NEC Corporation
- Nahomi Ohta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor fabrication line with contamination preventing function
- Patent number 6,322,597
- Issue date Nov 27, 2001
- NEC Corporation
- Nahomi Ohta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet processing apparatus having individual reactivating feedback pa...
- Patent number 5,549,798
- Issue date Aug 27, 1996
- NEC Corporation
- Hiroshi Kitajima
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE