Nai-Wen Chang

Follow

Person

Changhua Hsien, TW

People

Patents Applicationslast 30 patents

Information Patent Application
Method for forming shallow trench isolation in semiconductor device
- Publication number 20030054608
- Publication date Mar 20, 2003
- Vanguard International Semiconductor Corporation
- Kuo-Shu Tseng
- H01 - BASIC ELECTRIC ELEMENTS