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Nam Pyo Lee
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Eden Prairie, MN, US
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Patents Grants
last 30 patents
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Patent Grant
Transition flow treatment process and apparatus
Patent number
7,156,927
Issue date
Jan 2, 2007
FSI International, Inc.
Kurt Karl Christenson
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
Cleaning process for semiconductor substrates
Publication number
20060272677
Publication date
Dec 7, 2006
Nam Pyo Lee
B08 - CLEANING
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Patent Application
Transition flow treatment process and apparatus
Publication number
20030188765
Publication date
Oct 9, 2003
Kurt Karl Christenson
B08 - CLEANING