Namho Yun

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Hwaseong-si, KR

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Patents Applicationslast 30 patents

Information Patent Application
EDGE RING AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210217649
- Publication date Jul 15, 2021
- TOKYO ELECTRON LIMITED
- Kazuhiko AKAHANE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200267826
- Publication date Aug 20, 2020
- TOKYO ELECTRON LIMITED
- Daisuke KAWADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200144090
- Publication date May 7, 2020
- TOKYO ELECTRON LIMITED
- Toshiya Tsukahara
- H01 - BASIC ELECTRIC ELEMENTS