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Namjun KANG
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Bucheon-si, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Method of plasma etching and method of fabricating semiconductor de...
Patent number
11,075,089
Issue date
Jul 27, 2021
Samsung Electronics Co., Ltd.
Hoyong Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of plasma etching and method of fabricating semiconductor de...
Patent number
11,075,088
Issue date
Jul 27, 2021
Samsung Electronics Co., Ltd.
Hoyong Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of plasma etching and method of fabricating semiconductor de...
Patent number
10,622,217
Issue date
Apr 14, 2020
Samsung Electronics Co., Ltd.
Hoyong Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system managing execution of preventative maintenance op...
Patent number
9,721,762
Issue date
Aug 1, 2017
Samsung Electronics Co., Ltd.
Kyounghoon Han
G05 - CONTROLLING REGULATING
Information
Patent Grant
Pulse plasma apparatus and drive method thereof
Patent number
9,378,931
Issue date
Jun 28, 2016
Samsung Electronics Co., Ltd.
Ohyung Kwon
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF PLASMA ETCHING AND METHOD OF FABRICATING SEMICONDUCTOR DE...
Publication number
20200234964
Publication date
Jul 23, 2020
Samsung Electronics Co., Ltd.
Hoyong PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PLASMA ETCHING AND METHOD OF FABRICATING SEMICONDUCTOR DE...
Publication number
20200234965
Publication date
Jul 23, 2020
Samsung Electronics Co., Ltd.
Hoyong PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK, A PLASMA PROCESSING APPARATUS HAVING THE SAME,...
Publication number
20180358253
Publication date
Dec 13, 2018
Samsung Electronics Co., Ltd.
YOUNGJIN NOH
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
METHOD OF PLASMA ETCHING AND METHOD OF FABRICATING SEMICONDUCTOR DE...
Publication number
20170229312
Publication date
Aug 10, 2017
Samsung Electronics Co., Ltd.
Hoyong PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSE PLASMA APPARATUS AND DRIVE METHOD THEREOF
Publication number
20160126069
Publication date
May 5, 2016
Samsung Electronics Co., Ltd.
Ohyung KWON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM MANAGING EXECUTION OF PREVENTATIVE MAINTENANCE OP...
Publication number
20150198944
Publication date
Jul 16, 2015
Samsung Electronics Co., Ltd.
KYOUNGHOON HAN
G05 - CONTROLLING REGULATING