Namkyun Kim

Person

Pyeongtaek-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Method of measuring parameters of plasma, apparatus for measuring p...
- Patent number 12,222,362
- Issue date Feb 11, 2025
- Samsung Electronics Co., Ltd.
- Yoonbum Nam
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,183,555
- Issue date Dec 31, 2024
- Samsung Electronics Co., Ltd.
- Seunghan Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for radical diagnostic in plasma processing chamber, radical...
- Patent number 11,996,275
- Issue date May 28, 2024
- Samsung Electronics Co., Ltd.
- Sungyong Lim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR ETCHING A SUBSTRATE BY USING PLASMA
- Publication number 20250226187
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Heewon MIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA GENERATION CIRCUIT AND SUBSTRATE PROCESSING DEVICE INCLUDING...
- Publication number 20250218727
- Publication date Jul 3, 2025
- Samsung Electronics Co., Ltd.
- Sungyong LIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MEASURING PARAMETERS OF PLASMA, APPARATUS FOR MEASURING P...
- Publication number 20250146917
- Publication date May 8, 2025
- Samsung Electronics Co., Ltd.
- Yoonbum Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROVIDING RF POWER AND OPERATING METHOD THEREOF
- Publication number 20240304420
- Publication date Sep 12, 2024
- Samsung Electronics Co., Ltd.
- Siyoung Koh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CONTROL DEVICE AND PLASMA CONTROL METHOD
- Publication number 20240234094
- Publication date Jul 11, 2024
- Samsung Electronics Co., Ltd.
- Changho KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CONTROL DEVICE AND PLASMA CONTROL METHOD
- Publication number 20240136155
- Publication date Apr 25, 2024
- Samsung Electronics Co., Ltd.
- Changho KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CONTROL APPARATUS AND METHOD USING THE SAME
- Publication number 20240128054
- Publication date Apr 18, 2024
- Samsung Electronics Co., Ltd.
- Changho Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240038505
- Publication date Feb 1, 2024
- Samsung Electronics Co., Ltd.
- Donghyeon Na
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230402258
- Publication date Dec 14, 2023
- Samsung Electronics Co., Ltd.
- Yunhwan KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230317418
- Publication date Oct 5, 2023
- Samsung Electronics Co., Ltd.
- Jungmin KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CONTROL APPARATUS AND PLASMA PROCESSING SYSTEM
- Publication number 20230207294
- Publication date Jun 29, 2023
- Samsung Electronics Co., Ltd.
- Hadong JIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR RADICAL DIAGNOSTIC IN PLASMA PROCESSING CHAMBER, RADICAL...
- Publication number 20230197423
- Publication date Jun 22, 2023
- Samsung Electronics Co., Ltd.
- Sungyong LIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20230143049
- Publication date May 11, 2023
- Samsung Electronics Co., Ltd.
- Seunghan Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING PLURALITY OF ELECTRODES
- Publication number 20230100582
- Publication date Mar 30, 2023
- Samsung Electronics Co., Ltd.
- Yunhwan KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MEASURING PARAMETERS OF PLASMA, APPARATUS FOR MEASURING P...
- Publication number 20230060400
- Publication date Mar 2, 2023
- Samsung Electronics Co., Ltd.
- Yoonbum Nam
- H01 - BASIC ELECTRIC ELEMENTS

Namkyun Kim

Person

Patents Grantslast 30 patents

Method of measuring parameters of plasma, apparatus for measuring p...

Substrate processing apparatus and method of manufacturing semicond...

Device for radical diagnostic in plasma processing chamber, radical...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS FOR ETCHING A SUBSTRATE BY USING PLASMA

PLASMA GENERATION CIRCUIT AND SUBSTRATE PROCESSING DEVICE INCLUDING...

METHOD OF MEASURING PARAMETERS OF PLASMA, APPARATUS FOR MEASURING P...

APPARATUS FOR PROVIDING RF POWER AND OPERATING METHOD THEREOF

PLASMA CONTROL DEVICE AND PLASMA CONTROL METHOD

PLASMA CONTROL DEVICE AND PLASMA CONTROL METHOD

PLASMA CONTROL APPARATUS AND METHOD USING THE SAME

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

PLASMA CONTROL APPARATUS AND PLASMA PROCESSING SYSTEM

DEVICE FOR RADICAL DIAGNOSTIC IN PLASMA PROCESSING CHAMBER, RADICAL...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS INCLUDING PLURALITY OF ELECTRODES

METHOD OF MEASURING PARAMETERS OF PLASMA, APPARATUS FOR MEASURING P...