Nan Gao

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Beijing, CN

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Patents Grantslast 30 patents

Information Patent Grant
Projection-type photolithography system using composite photon sieve
- Patent number 8,736,812
- Issue date May 27, 2014
- Institute of Microelectronics, Chinese Academy of Sciences
- Changqing Xie
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION-TYPE PHOTOLITHOGRAPHY SYSTEM USING COMPOSITE PHOTON SIEVE
- Publication number 20130044299
- Publication date Feb 21, 2013
- Institute of Microelectronics, Chinese Academy of Sciences
- Changqing Xie
- G02 - OPTICS