Nan LIN

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Illumination source and associated metrology apparatus
- Patent number 12,044,951
- Issue date Jul 23, 2024
- ASML Netherlands B.V.
- Wenjie Jin
- G02 - OPTICS
Information Patent Grant
HHG source, inspection apparatus and method for performing a measur...
- Patent number 10,816,906
- Issue date Oct 27, 2020
- ASML Netherlands B.V.
- Nan Lin
- G02 - OPTICS
Information Patent Grant
Apparatus for delivering gas and illumination source for generating...
- Patent number 10,630,037
- Issue date Apr 21, 2020
- ASML Netherlands B.V.
- Sudhir Srivastava
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for delivering gas and illumination source for generating...
- Patent number 10,530,111
- Issue date Jan 7, 2020
- ASML Netherlands B.V.
- Sudhir Srivastava
- G01 - MEASURING TESTING
Information Patent Grant
Illumination source for an inspection apparatus, inspection apparat...
- Patent number 10,451,559
- Issue date Oct 22, 2019
- ASML Netherlands B.V.
- Peter Danny Van Voorst
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for predicting performance of a measurement m...
- Patent number 10,379,448
- Issue date Aug 13, 2019
- ASML Netherlands B.V.
- Simon Gijsbert Josephus Mathijssen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination source for an inspection apparatus, inspection apparat...
- Patent number 10,330,606
- Issue date Jun 25, 2019
- ASML Netherlands B.V.
- Peter Danny Van Voorst
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination source for an inspection apparatus, inspection apparat...
- Patent number 10,267,744
- Issue date Apr 23, 2019
- ASML Netherlands B.V.
- Patricius Aloysius Jacobus Tinnemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
HHG source, inspection apparatus and method for performing a measur...
- Patent number 10,234,771
- Issue date Mar 19, 2019
- ASML Netherlands B.V.
- Nan Lin
- G02 - OPTICS
Information Patent Grant
Method and apparatus for determining the property of a structure, d...
- Patent number 10,133,192
- Issue date Nov 20, 2018
- ASML Netherlands B.V.
- Patricius Aloysius Jacobus Tinnemans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and method for performing a measurement
- Patent number 10,067,068
- Issue date Sep 4, 2018
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for generating illuminating radiation
- Patent number 10,048,596
- Issue date Aug 14, 2018
- ASML Netherlands B.V.
- Nan Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METROLOGY APPARATUS AND METROLOGY METHODS BASED ON HIGH HARMONIC GE...
- Publication number 20240003809
- Publication date Jan 4, 2024
- ASML NETHERLANDS B.V.
- Peter Michael KRAUS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY APPARATUS BASED ON HIGH HARMONIC GENERATION AND ASSOCIATE...
- Publication number 20240004312
- Publication date Jan 4, 2024
- ASML NETHERLANDS B.V.
- Peter Michael KRAUS
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
AN ILLUMINATION SOURCE AND ASSOCIATED METROLOGY APPARATUS
- Publication number 20230288818
- Publication date Sep 14, 2023
- ASML Netherlands B,V.
- Wenjie JIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
AN ILLUMINATION SOURCE AND ASSOCIATED METROLOGY APPARATUS
- Publication number 20220382124
- Publication date Dec 1, 2022
- ASML NETHERLANDS B.V.
- Wenjie JIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
AN IMPROVED HIGH HARMONIC GENERATION APPARATUS
- Publication number 20220326152
- Publication date Oct 13, 2022
- ASML NETHERLANDS B.V.
- Adrianus Johannes Hendrikus SCHELLEKENS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus For Delivering Gas and Illumination Source for Generating...
- Publication number 20190212657
- Publication date Jul 11, 2019
- ASML NETHERLANDS B.V.
- Sudhir SRIVASTAVA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HHG Source, Inspection Apparatus and Method for Performing a Measur...
- Publication number 20190155171
- Publication date May 23, 2019
- ASML NETHERLANDS B.V.
- Nan LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and Apparatus for Determining the Position of a Spot of Rad...
- Publication number 20190049861
- Publication date Feb 14, 2019
- ASML NETHERLANDS B.V.
- Peter Danny VAN VOORST
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Illumination Source for an Inspection Apparatus, Inspection Apparat...
- Publication number 20190003981
- Publication date Jan 3, 2019
- ASML NETHERLANDS B.V.
- Peter Danny Van Voorst
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus For Delivering Gas and Illumination Source for Generating...
- Publication number 20180267411
- Publication date Sep 20, 2018
- ASML NETHERLANDS B.V.
- Sudhir SRIVASTAVA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND APPARATUS FOR PREDICTING PERFORMANCE OF A MEASUREMENT M...
- Publication number 20180224753
- Publication date Aug 9, 2018
- ASML NETHERLANDS B.V.
- Simon Gijsbert Josephus MATHIJSSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination Source for an Inspection Apparatus, Inspection Apparat...
- Publication number 20180073992
- Publication date Mar 15, 2018
- ASML NETHERLANDS B.V.
- Peter Danny VAN VOORST
- G01 - MEASURING TESTING
Information Patent Application
Illumination Source for an Inspection Apparatus, Inspection Apparat...
- Publication number 20180011029
- Publication date Jan 11, 2018
- ASML NETHERLANDS B.V.
- Patricius Aloysius Jacobus TINNEMANS
- G02 - OPTICS
Information Patent Application
Method and Apparatus for Generating Illuminating Radiation
- Publication number 20170322497
- Publication date Nov 9, 2017
- ASML NETHERLANDS B.V.
- Nan LIN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
HHG Source, Inspection Apparatus and Method for Performing a Measur...
- Publication number 20170315456
- Publication date Nov 2, 2017
- ASML NETHERLANDS B.V.
- Nan LIN
- G02 - OPTICS
Information Patent Application
Method and Apparatus for Determining the Property of a Structure, D...
- Publication number 20170315055
- Publication date Nov 2, 2017
- ASML NETHERLANDS B.V.
- Patricius Aloysius Jacobus TINNEMANS
- G01 - MEASURING TESTING
Information Patent Application
Lithographic Apparatus and Method for Performing a Measurement
- Publication number 20170184511
- Publication date Jun 29, 2017
- ASML NETHERLANDS B.V.
- Arie Jeffrey DEN BOEF
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Illumination source and associated metrology apparatus

HHG source, inspection apparatus and method for performing a measur...

Apparatus for delivering gas and illumination source for generating...

Apparatus for delivering gas and illumination source for generating...

Illumination source for an inspection apparatus, inspection apparat...

Methods and apparatus for predicting performance of a measurement m...

Illumination source for an inspection apparatus, inspection apparat...

Illumination source for an inspection apparatus, inspection apparat...

HHG source, inspection apparatus and method for performing a measur...

Method and apparatus for determining the property of a structure, d...

Lithographic apparatus and method for performing a measurement

Method and apparatus for generating illuminating radiation

Patents Applicationslast 30 patents

METROLOGY APPARATUS AND METROLOGY METHODS BASED ON HIGH HARMONIC GE...

METROLOGY APPARATUS BASED ON HIGH HARMONIC GENERATION AND ASSOCIATE...

AN ILLUMINATION SOURCE AND ASSOCIATED METROLOGY APPARATUS

AN ILLUMINATION SOURCE AND ASSOCIATED METROLOGY APPARATUS

AN IMPROVED HIGH HARMONIC GENERATION APPARATUS

Apparatus For Delivering Gas and Illumination Source for Generating...

HHG Source, Inspection Apparatus and Method for Performing a Measur...

Methods and Apparatus for Determining the Position of a Spot of Rad...

Illumination Source for an Inspection Apparatus, Inspection Apparat...

Apparatus For Delivering Gas and Illumination Source for Generating...

METHODS AND APPARATUS FOR PREDICTING PERFORMANCE OF A MEASUREMENT M...

Illumination Source for an Inspection Apparatus, Inspection Apparat...

Illumination Source for an Inspection Apparatus, Inspection Apparat...

Method and Apparatus for Generating Illuminating Radiation

HHG Source, Inspection Apparatus and Method for Performing a Measur...

Method and Apparatus for Determining the Property of a Structure, D...

Lithographic Apparatus and Method for Performing a Measurement