Nanako Shinoda

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Nirasaki City, JP

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Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER METHOD
- Publication number 20240153807
- Publication date May 9, 2024
- TOKYO ELECTRON LIMITED
- Nanako SHINODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20130180448
- Publication date Jul 18, 2013
- TOKYO ELECTRON LIMITED
- Hiromitsu Sakaue
- H01 - BASIC ELECTRIC ELEMENTS