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Nanako TAMARI
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Plasma processing method
Patent number
11,355,324
Issue date
Jun 7, 2022
HITACHI HIGH-TECH CORPORATION
Kosa Hirota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
10,460,913
Issue date
Oct 29, 2019
Hitachi High-Technologies Corporation
Nanako Tamari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
9,741,579
Issue date
Aug 22, 2017
Hitachi High-Technologies Corporation
Nanako Tamari
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
APPARATUS DIAGNOSTIC SYSTEM, APPARATUS DIAGNOSTIC APPARATUS, SEMICO...
Publication number
20240310827
Publication date
Sep 19, 2024
Hitachi High-Tech Corporation
Nanako Tamari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20220359166
Publication date
Nov 10, 2022
Hitachi High-Tech Corporation
Nanako Tamari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD
Publication number
20220262606
Publication date
Aug 18, 2022
HITACHI HIGH-TECH CORPORATION
Kosa Hirota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD
Publication number
20200294777
Publication date
Sep 17, 2020
Hitachi High-Technologies Corporation
Kosa HIROTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THE PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20190006153
Publication date
Jan 3, 2019
Hitachi High-Technologies Corporation
Nanako TAMARI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20160254163
Publication date
Sep 1, 2016
Hitachi High-Technologies Corporation
Nanako TAMARI
H01 - BASIC ELECTRIC ELEMENTS