NanChang Zhu

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Cantilever-type probe with multiple metallic coatings
- Patent number 11,543,431
- Issue date Jan 3, 2023
- KLA Corporation
- Hongshuo Zou
- G01 - MEASURING TESTING
Information Patent Grant
Resistivity probes with curved portions
- Patent number 11,249,110
- Issue date Feb 15, 2022
- KLA-Tencor Corporation
- Walter H. Johnson
- G01 - MEASURING TESTING
Information Patent Grant
Dynamic determination of metal film thickness from sheet resistance...
- Patent number 10,663,279
- Issue date May 26, 2020
- KLA-Tencor Corporation
- Xianghua Liu
- G01 - MEASURING TESTING
Information Patent Grant
Dynamic determination of metal film thickness from sheet resistance...
- Patent number 10,598,477
- Issue date Mar 24, 2020
- KLA-Tencor Corporation
- Xianghua Liu
- G01 - MEASURING TESTING
Information Patent Grant
Resistivity probe having movable needle bodies
- Patent number 10,514,391
- Issue date Dec 24, 2019
- KLA-Tencor Corporation
- Walter H. Johnson
- G01 - MEASURING TESTING
Information Patent Grant
Multiple pin probes with support for performing parallel measurements
- Patent number 10,302,677
- Issue date May 28, 2019
- KLA-Tencor Corporation
- Nanchang Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Combined semiconductor metrology system
- Patent number 9,553,034
- Issue date Jan 24, 2017
- KLA-Tencor Corporation
- Scott A. Young
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable spacing four-point probe pin device and method
- Patent number 9,435,826
- Issue date Sep 6, 2016
- KLA-Tencor Corporation
- Walter H. Johnson
- G01 - MEASURING TESTING
Information Patent Grant
Variable pressure four-point coated probe pin device and method
- Patent number 9,030,219
- Issue date May 12, 2015
- KLA-Tencor Corporation
- Walter H. Johnson
- G01 - MEASURING TESTING
Information Patent Grant
System and method for nondestructively measuring concentration and...
- Patent number 8,804,106
- Issue date Aug 12, 2014
- KLA-Tencor Corporation
- NanChang Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for determining dielectric layer properties
- Patent number 8,004,290
- Issue date Aug 23, 2011
- KLA-Tencor Corporation
- Xiafang Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Substrate conditioning for corona charge control
- Patent number 7,724,003
- Issue date May 25, 2010
- KLA-Tencor Corporation
- NanChang Zhu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Cantilever-Type Probe with Multiple Metallic Coatings
- Publication number 20220214375
- Publication date Jul 7, 2022
- KLA Corporation
- Hongshuo Zou
- G01 - MEASURING TESTING
Information Patent Application
Cantilever-Type Probe with Multiple Metallic Coatings
- Publication number 20210333307
- Publication date Oct 28, 2021
- KLA Corporation
- Hongshuo Zou
- G01 - MEASURING TESTING
Information Patent Application
Multi-Pin Dense Array Resistivity Probe
- Publication number 20200072869
- Publication date Mar 5, 2020
- KLA-Tencor Corporation
- Walter H. Johnson
- G01 - MEASURING TESTING
Information Patent Application
Multi-Pin Dense Array Resistivity Probe
- Publication number 20180052189
- Publication date Feb 22, 2018
- KLA-Tencor Corporation
- Walter H. Johnson
- G01 - MEASURING TESTING
Information Patent Application
Dynamic Determination of Metal Film Thickness from Sheet Resistance...
- Publication number 20170227347
- Publication date Aug 10, 2017
- KLA-Tencor Corporation
- Xianghua Liu
- G01 - MEASURING TESTING
Information Patent Application
Dynamic Determination of Metal Film Thickness from Sheet Resistance...
- Publication number 20170227348
- Publication date Aug 10, 2017
- KLA-Tencor Corporation
- Xianghua Liu
- G01 - MEASURING TESTING
Information Patent Application
Multiple Pin Probes with Support for Performing Parallel Measurements
- Publication number 20160320430
- Publication date Nov 3, 2016
- KLA-Tencor Corporation
- Nanchang Zhu
- G01 - MEASURING TESTING
Information Patent Application
VARIABLE SPACING FOUR-POINT PROBE PIN DEVICE AND METHOD
- Publication number 20130300445
- Publication date Nov 14, 2013
- Walter H. Johnson
- G01 - MEASURING TESTING
Information Patent Application
VARIABLE PRESSURE FOUR-POINT COATED PROBE PIN DEVICE AND METHOD
- Publication number 20130229196
- Publication date Sep 5, 2013
- KLA-Tencor Corporation
- Walter H. Johnson
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR NONDESTRUCTIVELY MEASURING CONCENTRATION AND...
- Publication number 20130003050
- Publication date Jan 3, 2013
- KLA-Tencor Corporation
- NanChang Zhu
- G01 - MEASURING TESTING

NanChang Zhu

Person

Patents Grantslast 30 patents

Cantilever-type probe with multiple metallic coatings

Resistivity probes with curved portions

Dynamic determination of metal film thickness from sheet resistance...

Dynamic determination of metal film thickness from sheet resistance...

Resistivity probe having movable needle bodies

Multiple pin probes with support for performing parallel measurements

Combined semiconductor metrology system

Variable spacing four-point probe pin device and method

Variable pressure four-point coated probe pin device and method

System and method for nondestructively measuring concentration and...

Method and apparatus for determining dielectric layer properties

Substrate conditioning for corona charge control

Patents Applicationslast 30 patents

Cantilever-Type Probe with Multiple Metallic Coatings

Cantilever-Type Probe with Multiple Metallic Coatings

Multi-Pin Dense Array Resistivity Probe

Multi-Pin Dense Array Resistivity Probe

Dynamic Determination of Metal Film Thickness from Sheet Resistance...

Dynamic Determination of Metal Film Thickness from Sheet Resistance...

Multiple Pin Probes with Support for Performing Parallel Measurements

VARIABLE SPACING FOUR-POINT PROBE PIN DEVICE AND METHOD

VARIABLE PRESSURE FOUR-POINT COATED PROBE PIN DEVICE AND METHOD

SYSTEM AND METHOD FOR NONDESTRUCTIVELY MEASURING CONCENTRATION AND...