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Nancy J. Wheeler
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Mountain View, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Device having etched feature with shrinkage carryover
Patent number
7,829,852
Issue date
Nov 9, 2010
Intel Corporation
Gary X. Cao
G01 - MEASURING TESTING
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Patent Grant
Characterizing resist line shrinkage due to CD-SEM inspection
Patent number
7,285,781
Issue date
Oct 23, 2007
Intel Corporation
Gary X. Cao
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
DEVICE HAVING ETCHED FEATURE WITH SHRINKAGE CARRYOVER
Publication number
20080020302
Publication date
Jan 24, 2008
Gary X. Cao
G01 - MEASURING TESTING
Information
Patent Application
Characterizing resist line shrinkage due to CD-SEM inspection
Publication number
20060006328
Publication date
Jan 12, 2006
Gary X. Cao
G01 - MEASURING TESTING