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Nancy Tran
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San Jose, CA, US
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last 30 patents
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Patent Grant
Method and apparatus for side wall passivation for organic etch
Patent number
6,465,159
Issue date
Oct 15, 2002
Lam Research Corporation
Tuqiang Ni
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods of preventing post-etch corrosion of an aluminum neodymium-...
Patent number
6,197,388
Issue date
Mar 6, 2001
Lam Research Corporation
Thomas S. Choi
H01 - BASIC ELECTRIC ELEMENTS