Naofumi Kishita

Person

Kumamoto-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 10,643,872
- Issue date May 5, 2020
- Tokyo Electron Limited
- Masahiro Abe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 9,899,244
- Issue date Feb 20, 2018
- Tokyo Electron Limited
- Naofumi Kishita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid treatment apparatus
- Patent number 9,620,394
- Issue date Apr 11, 2017
- Tokyo Electron Limited
- Naofumi Kishita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Periphery coating apparatus, periphery coating method and storage m...
- Patent number 9,082,614
- Issue date Jul 14, 2015
- Tokyo Electron Limited
- Shinichi Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Periphery coating apparatus, periphery coating method and storage m...
- Patent number 9,027,508
- Issue date May 12, 2015
- Tokyo Electron Limited
- Shinichi Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet processing apparatus, wet processing method and storage medium
- Patent number 8,722,152
- Issue date May 13, 2014
- Tokyo Electron Limited
- Naofumi Kishita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid processing apparatus, liquid processing method and storage m...
- Patent number 8,671,875
- Issue date Mar 18, 2014
- Tokyo Electron Limited
- Shuichi Nagamine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wet processing apparatus, wet processing method and storage medium
- Patent number 8,522,714
- Issue date Sep 3, 2013
- Tokyo Electron Limited
- Naofumi Kishita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Solution treatment apparatus, solution treatment method and resist...
- Patent number 8,375,887
- Issue date Feb 19, 2013
- Tokyo Electron Limited
- Koji Takayanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid treatment apparatus, mounting and dismounting method of a cu...
- Patent number 8,354,141
- Issue date Jan 15, 2013
- Tokyo Electron Limited
- Tsunenaga Nakashima
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Liquid treatment apparatus, mounting and dismounting method of a cu...
- Patent number 7,984,690
- Issue date Jul 26, 2011
- Tokyo Electron Limited
- Tsunenaga Nakashima
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Coater cup
- Patent number D610176
- Issue date Feb 16, 2010
- Tokyo Electron Limited
- Shuichi Nagamine
- D15 - Machines not elsewhere specified
Information Patent Grant
Substrate treatment apparatus
- Patent number 7,344,600
- Issue date Mar 18, 2008
- Tokyo Electron Limited
- Hiroichi Inada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20170358464
- Publication date Dec 14, 2017
- TOKYO ELECTRON LIMITED
- Masahiro Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERIPHERY COATING APPARATUS, PERIPHERY COATING METHOD AND STORAGE M...
- Publication number 20150214046
- Publication date Jul 30, 2015
- TOKYO ELECTRON LIMITED
- Shinichi Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20140370199
- Publication date Dec 18, 2014
- Naofumi Kishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID TREATMENT APPARATUS
- Publication number 20140261163
- Publication date Sep 18, 2014
- TOKYO ELECTRON LIMITED
- Naofumi KISHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERIPHERY COATING APPARATUS, PERIPHERY COATING METHOD AND STORAGE M...
- Publication number 20140154890
- Publication date Jun 5, 2014
- TOKYO ELECTRON LIMITED
- Shinichi Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WET PROCESSING APPARATUS, WET PROCESSING METHOD AND STORAGE MEDIUM
- Publication number 20130273256
- Publication date Oct 17, 2013
- TOKYO ELECTRON LIMITED
- Naofumi KISHITA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID TREATMENT APPARATUS, MOUNTING AND DISMOUNTING METHOD OF A CU...
- Publication number 20110220216
- Publication date Sep 15, 2011
- TOKYO ELECTRON LIMITED
- Tsunenaga Nakashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WET PROCESSING APPARATUS, WET PROCESSING METHOD AND STORAGE MEDIUM
- Publication number 20110217473
- Publication date Sep 8, 2011
- TOKYO ELECTRON LIMITED
- Naofumi KISHITA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Solution treatment apparatus, solution treatment method and resist...
- Publication number 20100227056
- Publication date Sep 9, 2010
- TOKYO ELECTRON LIMITED
- Koji Takayanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...
- Publication number 20100040779
- Publication date Feb 18, 2010
- TOKYO ELECTRON LIMITED
- Shuichi NAGAMINE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Complex pipe and coating/development processing apparatus equipped...
- Publication number 20080289715
- Publication date Nov 27, 2008
- TOKYO ELECTRON LIMITED
- Tsunenaga Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid treatment apparatus, mounting and dismounting method of a cu...
- Publication number 20080092813
- Publication date Apr 24, 2008
- TOKYO ELECTRON LIMITED
- Tsunenaga Nakashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate treatment apparatus
- Publication number 20050145168
- Publication date Jul 7, 2005
- Hiroichi Inada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Naofumi Kishita

Person

Patents Grantslast 30 patents

Liquid processing apparatus, liquid processing method, and storage...

Liquid processing apparatus, liquid processing method, and storage...

Liquid treatment apparatus

Periphery coating apparatus, periphery coating method and storage m...

Periphery coating apparatus, periphery coating method and storage m...

Wet processing apparatus, wet processing method and storage medium

Liquid processing apparatus, liquid processing method and storage m...

Wet processing apparatus, wet processing method and storage medium

Solution treatment apparatus, solution treatment method and resist...

Liquid treatment apparatus, mounting and dismounting method of a cu...

Liquid treatment apparatus, mounting and dismounting method of a cu...

Coater cup

Substrate treatment apparatus

Patents Applicationslast 30 patents

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...

PERIPHERY COATING APPARATUS, PERIPHERY COATING METHOD AND STORAGE M...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...

LIQUID TREATMENT APPARATUS

PERIPHERY COATING APPARATUS, PERIPHERY COATING METHOD AND STORAGE M...

WET PROCESSING APPARATUS, WET PROCESSING METHOD AND STORAGE MEDIUM

LIQUID TREATMENT APPARATUS, MOUNTING AND DISMOUNTING METHOD OF A CU...

WET PROCESSING APPARATUS, WET PROCESSING METHOD AND STORAGE MEDIUM

Solution treatment apparatus, solution treatment method and resist...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...

Complex pipe and coating/development processing apparatus equipped...

Liquid treatment apparatus, mounting and dismounting method of a cu...

Substrate treatment apparatus