Naohiko Hamamura

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Chikushino, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method, recording medium and substrate process...
- Patent number 11,201,050
- Issue date Dec 14, 2021
- Tokyo Electron Limited
- Itaru Kanno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrates-washing apparatus
- Patent number 5,503,171
- Issue date Apr 2, 1996
- Tokyo Electron Limited
- Kenji Yokomizo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD, RECORDING MEDIUM AND SUBSTRATE PROCESS...
- Publication number 20190355574
- Publication date Nov 21, 2019
- TOKYO ELECTRON LIMITED
- Itaru Kanno
- F26 - DRYING