Naohiko KAWASHIMA

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Kyoto-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing system, contro...
- Patent number 9,389,601
- Issue date Jul 12, 2016
- SCREEN Holdings Co., Ltd.
- Yasunori Nakamura
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, CONTRO...
- Publication number 20140121791
- Publication date May 1, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Yasunori NAKAMURA
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...