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NAOHIKO OKUNISHI
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HWASEONG-SI, KR
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Patents Grants
last 30 patents
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Patent Grant
Plasma processing apparatus and method of fabricating semiconductor...
Patent number
11,538,660
Issue date
Dec 27, 2022
Samsung Electronics Co., Ltd.
Yoong Chung
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240355583
Publication date
Oct 24, 2024
Samsung Electronics Co., Ltd.
Naohiko OKUNISHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
Publication number
20240266144
Publication date
Aug 8, 2024
Samsung Electronics Co., Ltd.
JAEWON JEONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MEASURING PARAMETERS OF PLASMA, APPARATUS FOR MEASURING P...
Publication number
20230060400
Publication date
Mar 2, 2023
Samsung Electronics Co., Ltd.
Yoonbum Nam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPEDANCE MEASUREMENT JIG AND METHOD OF CONTROLLING A SUBSTRATE-PRO...
Publication number
20230010881
Publication date
Jan 12, 2023
Samsung Electronics Co., Ltd.
Byeongsang KIM
G01 - MEASURING TESTING
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR...
Publication number
20220139669
Publication date
May 5, 2022
Samsung Electronics Co., Ltd.
YOONG CHUNG
H01 - BASIC ELECTRIC ELEMENTS