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Naohiko Yasuhisa
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Ooita, JP
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last 30 patents
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Patent Grant
Semiconductor substrate and method of processing the same
Patent number
5,885,905
Issue date
Mar 23, 1999
Kabushiki Kaisha Toshiba
Souichi Nadahara
C30 - CRYSTAL GROWTH
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Patent Grant
Method for heat treating a semiconductor substrate to reduce defects
Patent number
5,502,010
Issue date
Mar 26, 1996
Kabushiki Kaisha Toshiba
Souichi Nadahara
C30 - CRYSTAL GROWTH
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Patent Grant
Heat treating apparatus
Patent number
5,318,633
Issue date
Jun 7, 1994
Tokyo Electron Sagami Limited
Akihito Yamamoto
C30 - CRYSTAL GROWTH