Naohiko YOSHIHARA

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,676,834
- Issue date Jun 13, 2023
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus
- Patent number 11,465,167
- Issue date Oct 11, 2022
- SCREEN Holdings Co., Ltd.
- Hiroshi Abe
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,152,204
- Issue date Oct 19, 2021
- SCREEN Holdings Co., Ltd.
- Hitoshi Nakai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,139,180
- Issue date Oct 5, 2021
- SCREEN Holdings Co., Ltd.
- Naohiko Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 10,964,526
- Issue date Mar 30, 2021
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate drying method and substrate processing apparatus
- Patent number 10,921,057
- Issue date Feb 16, 2021
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,825,713
- Issue date Nov 3, 2020
- SCREEN Holdings Co., Ltd.
- Naohiko Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate drying method and substrate processing apparatus
- Patent number 10,760,852
- Issue date Sep 1, 2020
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,695,792
- Issue date Jun 30, 2020
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,527,348
- Issue date Jan 7, 2020
- SCREEN Holdings Co., Ltd.
- Naohiko Yoshihara
- F26 - DRYING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,475,670
- Issue date Nov 12, 2019
- SCREEN Holdings Co., Ltd.
- Naohiko Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 10,249,487
- Issue date Apr 2, 2019
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,728,443
- Issue date Aug 8, 2017
- SCREEN Holdings Co., Ltd.
- Naohiko Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 9,607,844
- Issue date Mar 28, 2017
- SCREEN Holdings Co., Ltd.
- Jiro Okuda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230307258
- Publication date Sep 28, 2023
- SCREEN Holdings Co., Ltd.
- Katsuei HIGASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20200398302
- Publication date Dec 24, 2020
- SCREEN Holdings Co., Ltd.
- Hiroshi ABE
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200381246
- Publication date Dec 3, 2020
- SCREEN Holdings Co., Ltd.
- Hitoshi NAKAI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200243350
- Publication date Jul 30, 2020
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200035514
- Publication date Jan 30, 2020
- SCREEN Holdings Co., Ltd.
- Naohiko YOSHIHARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20190172703
- Publication date Jun 6, 2019
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE DRYING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190063834
- Publication date Feb 28, 2019
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- B08 - CLEANING
Information Patent Application
SUBSTRATE DRYING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190063833
- Publication date Feb 28, 2019
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- F26 - DRYING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180308715
- Publication date Oct 25, 2018
- SCREEN Holdings Co., Ltd.
- Naohiko YOSHIHARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20180272376
- Publication date Sep 27, 2018
- SCREEN Holdings Co., Ltd.
- Hiroshi ABE
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180193886
- Publication date Jul 12, 2018
- SCREEN Holdings Co., Ltd.
- Hiroshi ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180087836
- Publication date Mar 29, 2018
- SCREEN Holdings Co., Ltd.
- Naohiko YOSHIHARA
- F26 - DRYING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170301580
- Publication date Oct 19, 2017
- SCREEN Holdings Co., Ltd.
- Naohiko YOSHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170282210
- Publication date Oct 5, 2017
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20160214148
- Publication date Jul 28, 2016
- SCREEN Holdings Co., Ltd.
- Manabu OKUTANI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160093516
- Publication date Mar 31, 2016
- SCREEN Holdings Co., Ltd.
- Jiro OKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20150270146
- Publication date Sep 24, 2015
- SCREEN Holdings Co., Ltd.
- Naohiko YOSHIHARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20150243542
- Publication date Aug 27, 2015
- SCREEN Holdings Co., Ltd.
- Naohiko YOSHIHARA
- H01 - BASIC ELECTRIC ELEMENTS

Naohiko YOSHIHARA

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Substrate treatment apparatus

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing method

Substrate drying method and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate drying method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATMENT APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD

SUBSTRATE DRYING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE DRYING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATMENT APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD