TREA

Naohiro Shoda

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  • Los Gatos, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Conformal film deposition for gapfill
    • Patent number 9,355,886
    • Issue date May 31, 2016
    • Novellus Systems, Inc.
    • Shankar Swaminathan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Gap fill integration
    • Patent number 8,728,958
    • Issue date May 20, 2014
    • Novellus Systems, Inc.
    • Kaihan Ashtiani
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    METHODS AND APPARATUS FOR DIELECTRIC DEPOSITION
    • Publication number 20140302689
    • Publication date Oct 9, 2014
    • Novellus Systems, Inc.
    • Kaihan Ashtiani
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CONFORMAL FILM DEPOSITION FOR GAPFILL
    • Publication number 20140134827
    • Publication date May 15, 2014
    • Novellus Systems, Inc.
    • Shankar Swaminathan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    NOVEL GAP FILL INTEGRATION
    • Publication number 20110151678
    • Publication date Jun 23, 2011
    • Kaihan Ashtiani
    • H01 - BASIC ELECTRIC ELEMENTS