Naokatsu Ikegami

Person

Saitama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of fabricating semiconductor device including forming a prot...
- Patent number 7,622,394
- Issue date Nov 24, 2009
- Oki Semiconductor Co., Ltd.
- Naokatsu Ikegami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acceleration sensor manufacturable by simplified method
- Patent number 7,509,858
- Issue date Mar 31, 2009
- Oki Semiconductor Co., Ltd.
- Naokatsu Ikegami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing MEMS device
- Patent number 7,323,354
- Issue date Jan 29, 2008
- Oki Electric Industry Co., Ltd.
- Naokatsu Ikegami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a micro-electrical-mechanical system
- Patent number 7,153,716
- Issue date Dec 26, 2006
- Oki Electric Industry Co., Ltd.
- Naokatsu Ikegami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Accelerometer
- Patent number 7,100,448
- Issue date Sep 5, 2006
- Oki Electric Industry Co., Ltd.
- Naokatsu Ikegami
- G01 - MEASURING TESTING
Information Patent Grant
Method for manufacturing a semiconductor device
- Patent number 7,084,069
- Issue date Aug 1, 2006
- Oki Electric Industry Co., Ltd.
- Naokatsu Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device having thin film SOI s...
- Patent number 7,029,957
- Issue date Apr 18, 2006
- Oki Electric Industry Co., Ltd.
- Naokatsu Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Acceleration sensor
- Patent number 7,004,030
- Issue date Feb 28, 2006
- Oki Electric Industry Co., Ltd.
- Naokatsu Ikegami
- G01 - MEASURING TESTING
Information Patent Grant
Method of manufacturing semiconductor device having thin film SOI s...
- Patent number 6,624,010
- Issue date Sep 23, 2003
- Oki Electric Industry Co., Ltd.
- Naokatsu Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing sidewall spacers of a semiconductor device...
- Patent number 6,500,745
- Issue date Dec 31, 2002
- Oki Electric Industry Co., Ltd.
- Naokatsu Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming via hole by dry etching
- Patent number 6,413,438
- Issue date Jul 2, 2002
- Oki Electric Industry Co., Ltd.
- Naokatsu Ikegami
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Method of dry etching organic SOG film
- Patent number 6,355,572
- Issue date Mar 12, 2002
- Oki Electric Industry Co., Ltd.
- Naokatsu Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming contact hole by dry etching
- Patent number 6,200,735
- Issue date Mar 13, 2001
- Oki Electric Industry Co., Ltd.
- Naokatsu Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for testing semiconductor device
- Patent number 6,037,588
- Issue date Mar 14, 2000
- Oki Electric Industry Co., Ltd.
- Guo-Lin Liu
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Piezoresistance element and semiconductor device having the same
- Publication number 20070215966
- Publication date Sep 20, 2007
- Oki Electric Industry Co., Ltd.
- Naokatsu Ikegami
- G01 - MEASURING TESTING
Information Patent Application
Method of fabricating semiconductor device
- Publication number 20060223324
- Publication date Oct 5, 2006
- Naokatsu Ikegami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Acceleration sensor manufactureable by simplified method
- Publication number 20060130580
- Publication date Jun 22, 2006
- Naokatsu Ikegami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of manufacturing a micro-electrical-mechanical system
- Publication number 20050266599
- Publication date Dec 1, 2005
- Naokatsu Ikegami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of manufacturing MEMS device
- Publication number 20050236682
- Publication date Oct 27, 2005
- Naokatsu Ikegami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Accelerometer
- Publication number 20050097958
- Publication date May 12, 2005
- Naokatsu Ikegami
- G01 - MEASURING TESTING
Information Patent Application
Acceleration sensor
- Publication number 20050097960
- Publication date May 12, 2005
- Naokatsu Ikegami
- G01 - MEASURING TESTING
Information Patent Application
Method of manufacturing semiconductor device having thin film SOI s...
- Publication number 20050019991
- Publication date Jan 27, 2005
- Naokatsu Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of dry etching organic SOG film
- Publication number 20040092111
- Publication date May 13, 2004
- Naokatsu Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing semiconductor device having thin film SOI s...
- Publication number 20030113958
- Publication date Jun 19, 2003
- Naokatsu Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for manufacturing a semiconductor device
- Publication number 20030040190
- Publication date Feb 27, 2003
- Naokatsu Ikegami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of dry etching organic SOG film
- Publication number 20020094695
- Publication date Jul 18, 2002
- Naokatsu Ikegami
- H01 - BASIC ELECTRIC ELEMENTS

Naokatsu Ikegami

Person

Patents Grantslast 30 patents

Method of fabricating semiconductor device including forming a prot...

Acceleration sensor manufacturable by simplified method

Method of manufacturing MEMS device

Method of manufacturing a micro-electrical-mechanical system

Accelerometer

Method for manufacturing a semiconductor device

Method of manufacturing semiconductor device having thin film SOI s...

Acceleration sensor

Method of manufacturing semiconductor device having thin film SOI s...

Method for manufacturing sidewall spacers of a semiconductor device...

Method of forming via hole by dry etching

Method of dry etching organic SOG film

Method for forming contact hole by dry etching

Method for testing semiconductor device

Patents Applicationslast 30 patents

Piezoresistance element and semiconductor device having the same

Method of fabricating semiconductor device

Acceleration sensor manufactureable by simplified method

Method of manufacturing a micro-electrical-mechanical system

Method of manufacturing MEMS device

Accelerometer

Acceleration sensor

Method of manufacturing semiconductor device having thin film SOI s...

Method of dry etching organic SOG film

Method of manufacturing semiconductor device having thin film SOI s...

Method for manufacturing a semiconductor device

Method of dry etching organic SOG film