Naokazu FURUYA

Person

Kurokawa-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 11,756,769
- Issue date Sep 12, 2023
- Tokyo Electron Limited
- Takashi Tohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exhaust device for processing apparatus provided with multiple blades
- Patent number 11,315,770
- Issue date Apr 26, 2022
- Tokyo Electron Limited
- Kazuya Nagaseki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Power feed member and substrate processing apparatus
- Patent number 10,943,766
- Issue date Mar 9, 2021
- Tokyo Electron Limited
- Shunichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 9,589,771
- Issue date Mar 7, 2017
- Tokyo Electron Limited
- Yuki Hosaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 9,011,635
- Issue date Apr 21, 2015
- Tokyo Electron Limited
- Yuki Hosaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20210313151
- Publication date Oct 7, 2021
- TOKYO ELECTRON LIMITED
- Takashi TOHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXHAUST DEVICE, PROCESSING APPARATUS, AND EXHAUSTING METHOD
- Publication number 20210296102
- Publication date Sep 23, 2021
- TOKYO ELECTRON LIMITED
- Kazuya NAGASEKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SPRAYING APPARATUS AND SPRAYING CONTROL METHOD
- Publication number 20190256962
- Publication date Aug 22, 2019
- Tokyo Electron Limited
- Yoshiyuki Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXHAUST DEVICE, PROCESSING APPARATUS, AND EXHAUSTING METHOD
- Publication number 20190172689
- Publication date Jun 6, 2019
- TOKYO ELECTRON LIMITED
- Kazuya NAGASEKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POWER FEED MEMBER AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180374679
- Publication date Dec 27, 2018
- TOKYO ELECTRON LIMITED
- Shunichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20120222817
- Publication date Sep 6, 2012
- TOKYO ELECTRON LIMITED
- Yuki HOSAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20120222814
- Publication date Sep 6, 2012
- TOKYO ELECTRON LIMITED
- Yuki HOSAKA
- H01 - BASIC ELECTRIC ELEMENTS

Naokazu FURUYA

Person

Patents Grantslast 30 patents

Plasma processing apparatus

Exhaust device for processing apparatus provided with multiple blades

Power feed member and substrate processing apparatus

Plasma processing apparatus

Plasma processing apparatus

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

EXHAUST DEVICE, PROCESSING APPARATUS, AND EXHAUSTING METHOD

PLASMA SPRAYING APPARATUS AND SPRAYING CONTROL METHOD

EXHAUST DEVICE, PROCESSING APPARATUS, AND EXHAUSTING METHOD

POWER FEED MEMBER AND SUBSTRATE PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS