TREA

Naoki Awamura

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  • Kanagawa, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Photomask inspection apparatus
    • Patent number 7,796,343
    • Issue date Sep 14, 2010
    • Lasertec Corporation
    • Kiwamu Takehisa
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Mach-zehnder type interferometer
    • Patent number 5,771,097
    • Issue date Jun 23, 1998
    • Lasertec Corporation
    • Haruhiko Kusunose
    • G01 - MEASURING TESTING

Patents Applicationslast 30 patents

  • Information Patent Application

    PHOTOMASK INSPECTION APPARATUS
    • Publication number 20090168191
    • Publication date Jul 2, 2009
    • Lasertec Corporation
    • Kiwamu Takehisa
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY