Naoki Dai

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate holding apparatus, substrate holding method, and substrat...
- Patent number 8,777,198
- Issue date Jul 15, 2014
- Ebara Corporation
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding apparatus, substrate holding method, and substrat...
- Patent number 8,141,513
- Issue date Mar 27, 2012
- Ebara Corporation
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding apparatus, substrate holding method, and substrat...
- Patent number 7,886,685
- Issue date Feb 15, 2011
- Ebara Corporation
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,575,636
- Issue date Aug 18, 2009
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,442,257
- Issue date Oct 28, 2008
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,087,117
- Issue date Aug 8, 2006
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 6,824,613
- Issue date Nov 30, 2004
- Ebara Corporation
- Naoki Dai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE HOLDING METHOD, AND SUBSTRAT...
- Publication number 20120141246
- Publication date Jun 7, 2012
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE HOLDING METHOD, AND SUBSTRAT...
- Publication number 20110094442
- Publication date Apr 28, 2011
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate holding apparatus, substrate holding method, and substrat...
- Publication number 20070070575
- Publication date Mar 29, 2007
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060243204
- Publication date Nov 2, 2006
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060236929
- Publication date Oct 26, 2006
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20050072358
- Publication date Apr 7, 2005
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing apparatus
- Publication number 20030221612
- Publication date Dec 4, 2003
- Naoki Dai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Substrate holding apparatus, substrate holding method, and substrat...

Substrate holding apparatus, substrate holding method, and substrat...

Substrate holding apparatus, substrate holding method, and substrat...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE HOLDING APPARATUS, SUBSTRATE HOLDING METHOD, AND SUBSTRAT...

SUBSTRATE HOLDING APPARATUS, SUBSTRATE HOLDING METHOD, AND SUBSTRAT...

Substrate holding apparatus, substrate holding method, and substrat...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus