Naoki Funabashi

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for disposing substrate and method for manufacturing article
- Patent number 11,774,850
- Issue date Oct 3, 2023
- Canon Kabushiki Kaisha
- Naoki Funabashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming apparatus, alignment mark detection method, and pat...
- Patent number 10,948,829
- Issue date Mar 16, 2021
- Canon Kabushiki Kaisha
- Naoki Funabashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device, lithography apparatus, and article produc...
- Patent number 10,431,463
- Issue date Oct 1, 2019
- Canon Kabushiki Kaisha
- Naoki Funabashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Holding device, lithography apparatus, and method for manufacturing...
- Patent number 9,740,109
- Issue date Aug 22, 2017
- Canon Kabushiki Kaisha
- Naoki Funabashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE ADJUSTMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICL...
- Publication number 20240345494
- Publication date Oct 17, 2024
- Canon Kabushiki Kaisha
- NAOKI FUNABASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLATE-SHAPED MEMBER, CONNECTOR FIXING METHOD, LITHOGRAPHY APPARATUS...
- Publication number 20240347986
- Publication date Oct 17, 2024
- Canon Kabushiki Kaisha
- MIZUKI NARIMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DISPOSING SUBSTRATE AND METHOD FOR MANUFACTURING ARTICLE
- Publication number 20210033967
- Publication date Feb 4, 2021
- Canon Kabushiki Kaisha
- Naoki Funabashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING APPARATUS, ALIGNMENT MARK DETECTION METHOD, AND PAT...
- Publication number 20190265595
- Publication date Aug 29, 2019
- Canon Kabushiki Kaisha
- Naoki Funabashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING APPARATUS, METHOD FOR DISPOSING SUBSTRATE, AND METH...
- Publication number 20170351173
- Publication date Dec 7, 2017
- Canon Kabushiki Kaisha
- Naoki Funabashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE PRODUC...
- Publication number 20160170313
- Publication date Jun 16, 2016
- Canon Kabushiki Kaisha
- Naoki Funabashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLDING DEVICE, LITHOGRAPHY APPARATUS, AND METHOD FOR MANUFACTURING...
- Publication number 20160154313
- Publication date Jun 2, 2016
- Canon Kabushiki Kaisha
- Naoki Funabashi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Naoki Funabashi

Person

Patents Grantslast 30 patents

Method for disposing substrate and method for manufacturing article

Pattern forming apparatus, alignment mark detection method, and pat...

Substrate holding device, lithography apparatus, and article produc...

Holding device, lithography apparatus, and method for manufacturing...

Patents Applicationslast 30 patents

TEMPERATURE ADJUSTMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICL...

PLATE-SHAPED MEMBER, CONNECTOR FIXING METHOD, LITHOGRAPHY APPARATUS...

METHOD FOR DISPOSING SUBSTRATE AND METHOD FOR MANUFACTURING ARTICLE

PATTERN FORMING APPARATUS, ALIGNMENT MARK DETECTION METHOD, AND PAT...

PATTERN FORMING APPARATUS, METHOD FOR DISPOSING SUBSTRATE, AND METH...

SUBSTRATE HOLDING DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE PRODUC...

HOLDING DEVICE, LITHOGRAPHY APPARATUS, AND METHOD FOR MANUFACTURING...