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Naoki Hosoya
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method and device for testing defect using SEM
Patent number
9,390,490
Issue date
Jul 12, 2016
Hitachi High-Technologies Corporation
Yuji Takagi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Inspection method and device therefor
Patent number
9,311,697
Issue date
Apr 12, 2016
Hitachi High-Technologies Corporation
Minoru Harada
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Global alignment using multiple alignment pattern candidates
Patent number
9,057,873
Issue date
Jun 16, 2015
Hitachi High-Technologies Corporation
Atsushi Miyamoto
G02 - OPTICS
Information
Patent Grant
Defect inspection method, and device thereof
Patent number
8,853,628
Issue date
Oct 7, 2014
Hitachi High-Technologies Corporation
Naoki Hosoya
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Inspection apparatus and method for producing image for inspection
Patent number
8,730,318
Issue date
May 20, 2014
Hitachi - GE Nuclear Energy, Ltd.
Kenji Nakahira
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Circuit pattern examining apparatus and circuit pattern examining m...
Patent number
8,509,516
Issue date
Aug 13, 2013
Hitachi High-Technologies Corporation
Takashi Hiroi
G01 - MEASURING TESTING
Information
Patent Grant
Inspection apparatus and an inspection method for inspecting a circ...
Patent number
8,121,395
Issue date
Feb 21, 2012
Hitachi High-Technologies Corporation
Takashi Hiroi
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for inspecting defects of circuit patterns
Patent number
8,111,902
Issue date
Feb 7, 2012
Hitachi High-Technologies Corporation
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for analyzing composition of defects
Patent number
6,870,169
Issue date
Mar 22, 2005
Hitachi, Ltd.
Kenji Obara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for inspecting defects in a semiconductor wafer
Patent number
6,792,366
Issue date
Sep 14, 2004
Hitachi, Ltd.
Naoki Hosoya
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for inspecting defects in a semiconductor wafer
Patent number
6,792,367
Issue date
Sep 14, 2004
Hitachi, Ltd.
Naoki Hosoya
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Input circuit of charge transfer device
Patent number
4,890,307
Issue date
Dec 26, 1989
Kabushiki Kaisha Toshiba
Shin-ichi Imai
G11 - INFORMATION STORAGE
Information
Patent Grant
Charge transfer device provided with charge detection circuit of a...
Patent number
4,800,579
Issue date
Jan 24, 1989
Kabushiki Kaisha Toshiba
Shin-ichi Imai
G11 - INFORMATION STORAGE
Patents Applications
last 30 patents
Information
Patent Application
Inspection Apparatus and Method for Producing Image for Inspection
Publication number
20140210988
Publication date
Jul 31, 2014
Hitachi-GE NUCLEAR ENERGY, LTD.
Kenji NAKAHIRA
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
GLOBAL ALIGNMENT USING MULTIPLE ALIGNMENT PATTERN CANDIDATES
Publication number
20130234019
Publication date
Sep 12, 2013
Atsushi Miyamoto
G02 - OPTICS
Information
Patent Application
DEFECT INSPECTION METHOD, AND DEVICE THEREOF
Publication number
20130119250
Publication date
May 16, 2013
Naoki Hosoya
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INSPECTION METHOD AND DEVICE THEREFOR
Publication number
20130108147
Publication date
May 2, 2013
Minoru Harada
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND DEVICE FOR TESTING DEFECT USING SEM
Publication number
20130070078
Publication date
Mar 21, 2013
Yuji Takagi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Inspection Apparatus and Method for Producing Image for Inspection
Publication number
20120026317
Publication date
Feb 2, 2012
Hitachi-GE NUCLEAR ENERGY, LTD.
Kenji NAKAHIRA
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
METHOD AND DEVICE FOR DEFECT INSPECTION
Publication number
20110188735
Publication date
Aug 4, 2011
Naoki Hosoya
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CIRCUIT PATTERN EXAMINING APPARATUS AND CIRCUIT PATTERN EXAMINING M...
Publication number
20110129141
Publication date
Jun 2, 2011
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INSPECTION APPARATUS AND AN INSPECTION METHOD FOR INSPECTING A CIRC...
Publication number
20090226075
Publication date
Sep 10, 2009
Hitachi High-Technologies Corporation
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and apparatus for inspecting defects of circuit patterns
Publication number
20070047800
Publication date
Mar 1, 2007
Takashi Hiroi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and its apparatus for classifying defects
Publication number
20060078188
Publication date
Apr 13, 2006
Masaki Kurihara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and apparatus for inspection
Publication number
20060078189
Publication date
Apr 13, 2006
Naoki Hosoya
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and apparatus for analyzing composition of defects
Publication number
20040126909
Publication date
Jul 1, 2004
Hitachi, Ltd
Kenji Obara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and apparatus for inspecting defects in a semiconductor wafer
Publication number
20030109952
Publication date
Jun 12, 2003
Hitachi, Ltd
Naoki Hosoya
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and apparatus for inspecting defects in a semiconductor wafer
Publication number
20030109070
Publication date
Jun 12, 2003
Hitachi, Ltd
Naoki Hosoya
G06 - COMPUTING CALCULATING COUNTING