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Naoki Mihara
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Tokyo, JP
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last 30 patents
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Patent Grant
Electrolytic processing apparatus and substrate processing method
Patent number
7,374,646
Issue date
May 20, 2008
Ebara Corporation
Hidenao Suzuki
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Electrolytic processing apparatus and substrate processing method
Publication number
20040256238
Publication date
Dec 23, 2004
Hidenao Suzuki
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR