Naoki Miyazaki

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Hino City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck and substrate processing apparatus
- Patent number 6,785,115
- Issue date Aug 31, 2004
- NGK Insulators, Ltd.
- Hideyoshi Tsuruta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Electrostatic chuck and substrate processing apparatus
- Publication number 20020159217
- Publication date Oct 31, 2002
- NGK Insulators, Ltd.
- Hideyoshi Tsuruta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...