-
Electrostatic chuck device
-
Patent number 7,848,077
-
Issue date Dec 7, 2010
-
Canon Anelva Corporation
-
Shigeru Mizuno
-
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
-
Electrostatic chuck device
-
Patent number 7,791,857
-
Issue date Sep 7, 2010
-
Canon Anelva Corporation
-
Shigeru Mizuno
-
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
-
Electrostatic chuck device
-
Patent number 7,724,493
-
Issue date May 25, 2010
-
Canon Anelva Corporation
-
Shigeru Mizuno
-
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
-
Electrostatic chuck device
-
Patent number 7,623,334
-
Issue date Nov 24, 2009
-
Canon Anelva Corporation
-
Shigeru Mizuno
-
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER