Naoki Ohara

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of forming silicon-containing insulation film having low die...
- Patent number 7,655,577
- Issue date Feb 2, 2010
- ASM Japan K.K.
- Yasuyoshi Hyodo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming interconnection in semiconductor device
- Patent number 7,354,852
- Issue date Apr 8, 2008
- ASM Japan K.K.
- Kiyohiro Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming silicon-containing insulation film having low die...
- Patent number 7,148,154
- Issue date Dec 12, 2006
- ASM Japan K.K.
- Yasuyoshi Hyodo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING SILICON-CONTAINING INSULATION FILM HAVING LOW DIE...
- Publication number 20070111540
- Publication date May 17, 2007
- ASM JAPAN K.K.
- Yasuyoshi Hyodo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING SILICON-CONTAINING INSULATION FILM HAVING LOW DIE...
- Publication number 20070066086
- Publication date Mar 22, 2007
- ASM JAPAN K.K.
- Yasuyoshi Hyodo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of producing advanced low dielectric constant film by UV lig...
- Publication number 20060286306
- Publication date Dec 21, 2006
- ASM JAPAN K.K.
- Naoki Ohara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor-manufacturing apparatus provided with ultraviolet lig...
- Publication number 20060165904
- Publication date Jul 27, 2006
- ASM JAPAN K.K.
- Naoki Ohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming interconnection in semiconductor device
- Publication number 20060160352
- Publication date Jul 20, 2006
- ASM JAPAN K.K.
- Kiyohiro Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming silicon-containing insulation film having low die...
- Publication number 20050042884
- Publication date Feb 24, 2005
- ASM JAPAN K.K.
- Yasuyoshi Hyodo
- H01 - BASIC ELECTRIC ELEMENTS