Naoki SATO

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning method and recording medium for recording cleaning program
- Patent number 11,530,486
- Issue date Dec 20, 2022
- Tokyo Electron Limited
- Daisuke Shirasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND PARTICLE REMOVAL METHOD
- Publication number 20230245871
- Publication date Aug 3, 2023
- TOKYO ELECTRON LIMITED
- Hiroshi NAGAIKE
- B08 - CLEANING
Information Patent Application
CLEANING RECIPE CREATION METHOD AND CLEANING METHOD
- Publication number 20210162469
- Publication date Jun 3, 2021
- TOKYO ELECTRON LIMITED
- Daisuke SHIRASAWA
- B08 - CLEANING
Information Patent Application
CLEANING METHOD AND RECORDING MEDIUM FOR RECORDING CLEANING PROGRAM
- Publication number 20210079533
- Publication date Mar 18, 2021
- TOKYO ELECTRON LIMITED
- Daisuke SHIRASAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...