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Naoki SUGAWA
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Miyagi, JP
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Patents Grants
last 30 patents
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Patent Grant
Workpiece placement apparatus and processing apparatus
Patent number
11,942,357
Issue date
Mar 26, 2024
Tokyo Electron Limited
Yohei Uchida
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Workpiece placement apparatus and processing apparatus
Patent number
11,410,871
Issue date
Aug 9, 2022
Tokyo Electron Limited
Yohei Uchida
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
WORKPIECE PLACEMENT APPARATUS AND PROCESSING APPARATUS
Publication number
20220336257
Publication date
Oct 20, 2022
TOKYO ELECTRON LIMITED
Yohei UCHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE AND PLASMA PROCESSING APPARATUS
Publication number
20210210369
Publication date
Jul 8, 2021
TOKYO ELECTRON LIMITED
Naoki SUGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANNULAR MEMBER, SUBSTRATE PROCESSING APPARATUS AND METHOD OF CONTRO...
Publication number
20210066053
Publication date
Mar 4, 2021
TOKYO ELECTRON LIMITED
Hiroshi NAGAIKE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WORKPIECE PLACEMENT APPARATUS AND PROCESSING APPARATUS
Publication number
20190279894
Publication date
Sep 12, 2019
TOKYO ELECTRON LIMITED
Yohei UCHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PART FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MA...
Publication number
20190164727
Publication date
May 30, 2019
TOKYO ELECTRON LIMITED
Naoki SUGAWA
H01 - BASIC ELECTRIC ELEMENTS