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Processing system
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Patent number RE40046
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Issue date Feb 12, 2008
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Tokyo Electron Limited
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Nobuyuki Okayama
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029 - Metal working
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Processing system
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Patent number RE39969
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Issue date Jan 1, 2008
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Tokyo Electron Limited
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Nobuyuki Okayama
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156 - Adhesive bonding and miscellaneous chemical manufacture
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Processing system
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Patent number RE39939
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Issue date Dec 18, 2007
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Tokyo Electron Limited
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Nobuyuki Okayama
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156 - Adhesive bonding and miscellaneous chemical manufacture
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Processing system
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Patent number 6,334,983
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Issue date Jan 1, 2002
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Tokyo Electron Limited
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Nobuyuki Okayama
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Ion implantation system
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Patent number 5,343,047
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Issue date Aug 30, 1994
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Tokyo Electron Limited
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Hiroo Ono
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus
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Patent number 5,252,892
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Issue date Oct 12, 1993
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Tokyo Electron Limited
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Akira Koshiishi
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H01 - BASIC ELECTRIC ELEMENTS
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Ion generator
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Patent number 5,101,110
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Issue date Mar 31, 1992
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Tokyo Electron Limited
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Masahiko Matsudo
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H01 - BASIC ELECTRIC ELEMENTS
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Ion generating apparatus
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Patent number 5,097,179
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Issue date Mar 17, 1992
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Tokyo Electron Limited
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Naoki Takayama
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H01 - BASIC ELECTRIC ELEMENTS
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Ion-producing apparatus
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Patent number 4,749,912
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Issue date Jun 7, 1988
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Rikagaku Kenkyusho
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Tamio Hara
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H01 - BASIC ELECTRIC ELEMENTS