Naoki TAMARU

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus, electrostatic attraction method, and e...
- Patent number 11,764,038
- Issue date Sep 19, 2023
- Tokyo Electron Limited
- Shoichiro Matsuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,715,630
- Issue date Aug 1, 2023
- Tokyo Electron Limited
- Yusuke Hayasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,705,308
- Issue date Jul 18, 2023
- Tokyo Electron Limited
- Shintaro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, electrostatic attraction method, and e...
- Patent number 10,879,050
- Issue date Dec 29, 2020
- Tokyo Electron Limited
- Shoichiro Matsuyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230326724
- Publication date Oct 12, 2023
- TOKYO ELECTRON LIMITED
- Yusuke HAYASAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20210142983
- Publication date May 13, 2021
- TOKYO ELECTRON LIMITED
- Shintaro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, ELECTROSTATIC ATTRACTION METHOD, AND E...
- Publication number 20210074522
- Publication date Mar 11, 2021
- TOKYO ELECTRON LIMITED
- Shoichiro MATSUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190348262
- Publication date Nov 14, 2019
- TOKYO ELECTRON LIMITED
- Yusuke HAYASAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, ELECTROSTATIC ATTRACTION METHOD, AND E...
- Publication number 20180350565
- Publication date Dec 6, 2018
- TOKYO ELECTRON LIMITED
- Shoichiro MATSUYAMA
- H01 - BASIC ELECTRIC ELEMENTS