Naoki TANIGUCHI

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 10,861,675
- Issue date Dec 8, 2020
- Tokyo Electron Limited
- Takao Funakubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 10,204,763
- Issue date Feb 12, 2019
- Tokyo Electron Limited
- Takao Funakubo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20190139744
- Publication date May 9, 2019
- TOKYO ELECTRON LIMITED
- Takao FUNAKUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20150380282
- Publication date Dec 31, 2015
- TOKYO ELECTRON LIMITED
- Takao FUNAKUBO
- H01 - BASIC ELECTRIC ELEMENTS