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Naoki TSUKAMOTO
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Sagamihara, JP
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last 30 patents
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Patent Grant
Method for manufacturing a semiconductor substrate by laser irradia...
Patent number
8,324,086
Issue date
Dec 4, 2012
Semiconductor Energy Laboratory Co., Ltd.
Akihisa Shimomura
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for manufacturing semiconductor substrate and method for man...
Patent number
7,842,583
Issue date
Nov 30, 2010
Semiconductor Energy Laboratory Co., Ltd.
Naoki Tsukamoto
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
SEMICONDUCTOR SUBSTRATE MANUFACTURING APPARATUS
Publication number
20090179160
Publication date
Jul 16, 2009
Semiconductor Energy Laboratory Co., Ltd.
Naoki TSUKAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCT...
Publication number
20090181552
Publication date
Jul 16, 2009
Semiconductor Energy Laboratory Co., Ltd.
Akihisa Shimomura
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE AND METHOD FOR MAN...
Publication number
20090170286
Publication date
Jul 2, 2009
Semiconductor Energy Laboratory Co., Ltd.
Naoki TSUKAMOTO
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR