Naoki UKAE

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Toyama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 10,755,962
- Issue date Aug 25, 2020
- Kokusai Electric Corporation
- Kazuya Nabeta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 9,305,820
- Issue date Apr 5, 2016
- Hitachi Kokusai Electric Inc.
- Kazuya Nabeta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20160201196
- Publication date Jul 14, 2016
- Hitachi Kokusai Electric Inc.
- Kazuya NABETA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20110139070
- Publication date Jun 16, 2011
- Hitachi Kokusai Electric Inc.
- Kazuya NABETA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...