Naoki UMESHITA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and ionic liquid
- Patent number 12,011,738
- Issue date Jun 18, 2024
- Tokyo Electron Limited
- Takeo Nakano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
LIQUID CIRCULATION SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND LIQU...
- Publication number 20240420970
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Takao OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS AND OXIDIZING GAS REMOVAL METHOD
- Publication number 20240087916
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20230230855
- Publication date Jul 20, 2023
- TOKYO ELECTRON LIMITED
- Takeo NAKANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND IONIC LIQUID
- Publication number 20230226571
- Publication date Jul 20, 2023
- TOKYO ELECTRON LIMITED
- Takeo NAKANO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR MANUFAC...
- Publication number 20230223251
- Publication date Jul 13, 2023
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE, GAS SHOWER HEAD, AND METHOD FOR...
- Publication number 20230094546
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS AND OXIDIZING GAS REMOVAL METHOD
- Publication number 20220403509
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Naoki UMESHITA

Person

Patents Grantslast 30 patents

Substrate processing method and ionic liquid

Patents Applicationslast 30 patents

LIQUID CIRCULATION SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND LIQU...

VACUUM PROCESSING APPARATUS AND OXIDIZING GAS REMOVAL METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING METHOD AND IONIC LIQUID

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR MANUFAC...

APPARATUS FOR PROCESSING SUBSTRATE, GAS SHOWER HEAD, AND METHOD FOR...

VACUUM PROCESSING APPARATUS AND OXIDIZING GAS REMOVAL METHOD