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Naokichi Hosokawa
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Tokyo, JP
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last 30 patents
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Patent Grant
Magnetron sputtering cathode apparatus
Patent number
5,458,759
Issue date
Oct 17, 1995
Anelva Corporation
Naokichi Hosokawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering apparatus
Patent number
5,382,344
Issue date
Jan 17, 1995
Anelva Corporation
Naokichi Hosokawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Target assembly capable of attaining a high step coverage ratio in...
Patent number
4,604,180
Issue date
Aug 5, 1986
Anelva Corporation
Yohichi Hirukawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...