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Naoko Hirose
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Tokyo, JP
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last 30 patents
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Patent Grant
Focused ion beam apparatus, and control method for focused ion beam...
Patent number
11,257,655
Issue date
Feb 22, 2022
Hitachi High-Tech Science Corporation
Yasuhiko Sugiyama
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Composite charged particle beam apparatus and control method thereof
Patent number
11,017,982
Issue date
May 25, 2021
Hitachi High-Tech Science Corporation
Yasuhiko Sugiyama
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
FOCUSED ION BEAM APPARATUS, AND CONTROL METHOD FOR FOCUSED ION BEAM...
Publication number
20210118642
Publication date
Apr 22, 2021
HITACHI HIGH-TECH SCIENCE CORPORATION
Yasuhiko SUGIYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITE CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF
Publication number
20200266029
Publication date
Aug 20, 2020
HITACHI HIGH-TECH SCIENCE CORPORATION
Yasuhiko SUGIYAMA
H01 - BASIC ELECTRIC ELEMENTS