Naomi Arita

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Osaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for cleaning semiconductor wafers
- Patent number 5,415,698
- Issue date May 16, 1995
- Matsushita Electric Industrial Co., Ltd.
- Sugao Fujinaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and process for washing wafers
- Patent number 5,292,373
- Issue date Mar 8, 1994
- Matsushita Electric Industrial Co., Ltd.
- Naomi Arita
- H01 - BASIC ELECTRIC ELEMENTS