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Naomitsu Fujishita
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Amagasaki, JP
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last 30 patents
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Patent Grant
Ion source having plasma chamber, an electron source, and a plasma...
Patent number
5,387,843
Issue date
Feb 7, 1995
Mitsubishi Denki Kabushiki Kaisha
Takahisa Nagayama
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electron shower apparatus including filament current control
Patent number
5,329,129
Issue date
Jul 12, 1994
Mitsubishi Denki Kabushiki Kaisha
Kazuhiro Shono
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Ion implantation apparatus
Patent number
5,132,545
Issue date
Jul 21, 1992
Mitsubishi Denki Kabushiki Kaisha
Kazuhiro Shono
H01 - BASIC ELECTRIC ELEMENTS